Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8894767 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Matthew L. Miller, Soonam Park +5 more | 2014-11-25 |
| 8409355 | Low profile process kit | Muhammad M. Rasheed, Teruki Iwashita, Hiroshi Otake, Yuki Koga, Kazutoshi Maehara +2 more | 2013-04-02 |
| 8108981 | Method of making an electrostatic chuck with reduced plasma penetration and arcing | Dmitry Lubomirsky, Kadthala Ramaya Narendranath, Sudhir Gondhalekar, Muhammad M. Rasheed, Tony Kaushal | 2012-02-07 |
| 7848076 | Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing | Kadthala Ramaya Narendranath, Dmitry Lubomirsky, Sudhir Goodhalekar, Muhammad M. Rasheed, Tony Kaushal | 2010-12-07 |
| 7789993 | Internal balanced coil for inductively coupled high density plasma processing chamber | Robert Chen, Canfeng Lai, Weiyi Luo, Zhong Qiang Hua, Siqing Lu +4 more | 2010-09-07 |
| 7572647 | Internal balanced coil for inductively coupled high density plasma processing chamber | Robert Chen, Canfeng Lai, Weiyi Luo, Zhong Qiang Hua, Siqing Lu +4 more | 2009-08-11 |