Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Cleaning a structure surface in an EUV chamber

Cleaning a structure surface in an EUV chamber

US Patent 11347154 · Granted May 31, 2022

Estimated economic value: $47,965,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Display device2025
Semiconductor device2025
Multi-scale system for projection micro stereolithography2025
Updating subsurface structural maps with well-measured orientation data while pr2025
Determining needle position2025
System and method of low-waste multi-material resin printing2025
Guiding device and associated system2025
Guiding device and associated system2025
Guiding device and associated system2025
Guiding device and associated system2025
Substrate holder, lithographic apparatus, device manufacturing method, and metho2025
Method and system for determination of seismic propagation velocities using nonl2025