Cleaning a structure surface in an EUV chamber

Assignee

• Asml Netherlands B.V.

Inventors

• Chunguang Xia (19 patents)
• Jonghoon Baek (25 patents)
• John Tom Stewart, IV (21 patents)
• Andrew David LaForge (13 patents)
• Deniz Van Heijnsbergen (2 patents)
• David Robert Evans (11 patents)
• Nina Vladimirovna Dziomkina (38 patents)
• Yue Ma (156 patents)

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