Issued Patents All Time
Showing 26–50 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8992723 | RF bus and RF return bus for plasma chamber electrode | Carl A. Sorensen, Jozef Kudela, Robin L. Tiner, John M. White | 2015-03-31 |
| 8883269 | Thin film deposition using microwave plasma | Tae Kyung Won, Helinda NOMINANDA, Seon-Mee Cho, Soo Young Choi, Beom Soo Park +2 more | 2014-11-11 |
| D717113 | Susceptor with heater | Gaku Furuta, John M. White, Robin L. Tiner, Soo Young Choi | 2014-11-11 |
| 8872428 | Plasma source with vertical gradient | Jozef Kudela, Tsutomu Tanaka, Carl A. Sorensen, John M. White | 2014-10-28 |
| D716098 | Susceptor with heater | Gaku Furuta, John M. White, Robin L. Tiner, Soo Young Choi, Shinichi Kurita | 2014-10-28 |
| D713200 | Susceptor with heater | Gaku Furuta, John M. White, Robin L. Tiner, Soo Young Choi | 2014-09-16 |
| 8674844 | Detecting plasma chamber malfunction | Beom Soo Park, Hong Soon Kim, Soo Young Choi, James Hoffman, John M. White | 2014-03-18 |
| 8567756 | Slit valve door able to compensate for chamber deflection | Mehran Behdjat, Shinichi Kurita, John M. White, Makoto Inagawa | 2013-10-29 |
| D680946 | Gas flow diffuser faceplate | John M. White, Soo Young Choi, Gaku Furuta, Shinichi Kurita, Carl Sorenson +1 more | 2013-04-30 |
| D669032 | Flow blocking shadow frame support | John M. White, Soo Young Choi, Gaku Furuta, Shinichi Kurita, Carl Sorenson +1 more | 2012-10-16 |
| 8272830 | Scissor lift transfer robot | Shinichi Kurita, Takayuki Matsumoto | 2012-09-25 |
| 8216422 | Substrate support bushing | Shinichi Kurita, Toshio Kiyotake | 2012-07-10 |
| 8124907 | Load lock chamber with decoupled slit valve door seal compartment | Jae-Chull Lee, Shinichi Kurita | 2012-02-28 |
| 8083853 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2011-12-27 |
| 8070408 | Load lock chamber for large area substrate processing system | Mehran Behdjat, Shinichi Kurita, Makoto Inagawa | 2011-12-06 |
| 8061949 | Multiple slot load lock chamber and method of operation | Shinichi Kurita, Jae-Chull Lee | 2011-11-22 |
| 8033245 | Substrate support bushing | Shinichi Kurita, Toshio Kiyotake | 2011-10-11 |
| 7845891 | Decoupled chamber body | Jae-Chull Lee, Shinichi Kurita, John M. White | 2010-12-07 |
| D627625 | Shadow frame support | John M. White, Jeffrey A. Kho, Robin L. Tiner | 2010-11-23 |
| 7822324 | Load lock chamber with heater in tube | Jae-Chull Lee, Shinichi Kurita | 2010-10-26 |
| 7735710 | Substrate support | Shinichi Kurita, Wendell T. Blonigan, Toshio Kiyotake, Hung T. Nguyen | 2010-06-15 |
| 7665951 | Multiple slot load lock chamber and method of operation | Shinichi Kurita, Jae-Chull Lee | 2010-02-23 |
| 7587812 | Electronic device manufacturing component with an embedded chip and methods of using the same | William Bagley, Paohuei Lee, Janusz Jozwiak | 2009-09-15 |
| 7589031 | Method of avoiding haze formation on surfaces of silicon-containing PECVD-deposited thin films | Chung-Hee Park, Beom Soo Park, Han Byoul Kim, Soo Young Choi, John M. White | 2009-09-15 |
| 7570130 | Apparatus and methods for a fixed impedance transformation network for use in connection with a plasma chamber | Carl A. Sorensen, John M. White | 2009-08-04 |