Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12071689 | Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processes | Ramesh Chandrasekharan, Michael Philip Roberts, Pulkit Agarwal, Adrien LaVoie, Ravi Kumar +2 more | 2024-08-27 |