Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997371 | Atomic layer etch methods and hardware for patterning applications | Purushottam Kumar, Adrien LaVoie | 2018-06-12 |
| 9947578 | Methods for forming low-resistance contacts through integrated process flow systems | Yu Lei, Vikash Banthia, Kai Wu, Xinyu Fu, Yi Xu +9 more | 2018-04-17 |
| 9925639 | Cleaning of chamber components with solid carbon dioxide particles | Song-Moon Suh, Yuanhong Guo, Guangchi Xuan | 2018-03-27 |
| 9536329 | Method and apparatus for performing sentiment analysis based on user reactions to displayable content | Neha Saxena, Raman Gupta | 2017-01-03 |
| 9425076 | Substrate transfer robot end effector | Daniel Greenberg, Song-Moon Suh, Jeffrey A. Brodine, Steven V. Sansoni, Glen T. Mori | 2016-08-23 |