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Methods for integrated circuit fabrication with protective coating for planarization |
Mirzafer Abatchev, David H. Wells, Baosuo Zhou |
2017-06-13 |
| 9610593 |
Device for positioning nanoparticles |
Neal R. Rueger, Gurtej S. Sandhu |
2017-04-04 |
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Methods of etching trenches into silicon of a semiconductor substrate |
— |
2016-12-20 |
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Device for controlling placement of nanoparticles |
Neal R. Rueger, Gurtej S. Sandhu |
2015-06-23 |
| 9003651 |
Methods for integrated circuit fabrication with protective coating for planarization |
Mirzafer Abatchev, David H. Wells, Baosuo Zhou |
2015-04-14 |
| 8802573 |
Methods of etching trenches into silicon of a semiconductor substrate, methods of forming trench isolation in silicon of a semiconductor substrate, and methods of forming a plurality of diodes |
— |
2014-08-12 |
| 8747557 |
Devices for positioning carbon nanoparticles, and systems for controlling placement of nanoparticles |
Neal R. Rueger, Gurtej S. Sandhu |
2014-06-10 |
| 8569863 |
Voltage-controlled semiconductor inductor and method |
— |
2013-10-29 |
| 8479384 |
Methods for integrated circuit fabrication with protective coating for planarization |
Mirzafer Abatchev, David H. Wells, Baosuo Zhou |
2013-07-09 |
| 8252658 |
Methods of etching trenches into silicon of a semiconductor substrate, methods of forming trench isolation in silicon of a semiconductor substrate, and methods of forming a plurality of diodes |
— |
2012-08-28 |
| 8183138 |
Methods for forming nanodots and/or a patterned material during the formation of a semiconductor device |
Mirzafer Abatchev |
2012-05-22 |
| 8011090 |
Method for forming and planarizing adjacent regions of an integrated circuit |
Mirzafer Abatchev, David H. Wells, Baosuo Zhou |
2011-09-06 |
| 7944019 |
Voltage-controlled semiconductor inductor and method |
— |
2011-05-17 |
| 7883927 |
Method and apparatus to sort nanotubes |
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2011-02-08 |
| 7704849 |
Methods of forming trench isolation in silicon of a semiconductor substrate by plasma |
— |
2010-04-27 |
| 7662299 |
Nanoimprint lithography template techniques for use during the fabrication of a semiconductor device and systems including same |
Mirzafer Abatchev |
2010-02-16 |
| 7662718 |
Trim process for critical dimension control for integrated circuits |
Mirzafer Abatchev, Baosuo Zhou |
2010-02-16 |
| 7517558 |
Methods for positioning carbon nanotubes |
Neal R. Rueger, Gurtej S. Sandhu |
2009-04-14 |
| 7511356 |
Voltage-controlled semiconductor inductor and method |
— |
2009-03-31 |
| 7473645 |
Method of depositing a layer comprising silicon, carbon, and fluorine onto a semiconductor substrate |
Mirzafer Abatchev |
2009-01-06 |
| 7459363 |
Line edge roughness reduction |
— |
2008-12-02 |
| 7410903 |
Methods of patterning substrates |
— |
2008-08-12 |
| 7393789 |
Protective coating for planarization |
Mirzafer Abatchev, David H. Wells, Baosuo Zhou |
2008-07-01 |
| 7291563 |
Method of etching a substrate; method of forming a feature on a substrate; and method of depositing a layer comprising silicon, carbon, and fluorine onto a semiconductor substrate |
Mirzafer Abatchev |
2007-11-06 |
