Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7271106 | Critical dimension control for integrated circuits | David K. Hwang, Robert Veltrop | 2007-09-18 |
| 7253118 | Pitch reduced patterns relative to photolithography features | Luan C. Tran, William T. Rericha, John Lee, Raman Alapati, Sheron Honarkhah +7 more | 2007-08-07 |
| 7115525 | Method for integrated circuit fabrication using pitch multiplication | Gurtej S. Sandhu, Luan C. Tran, William T. Rericha, D. Mark Durcan | 2006-10-03 |
| 7112533 | Plasma etching system and method | Brad J. Howard, Kevin G. Donohoe | 2006-09-26 |
| 6716758 | Aspect ratio controlled etch selectivity using time modulated DC bias voltage | Kevin G. Donohoe, Robert Veltrop | 2004-04-06 |