Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8257497 | Insitu post atomic layer deposition destruction of active species | Shuang Meng, Garo Derderian | 2012-09-04 |
| 8235364 | Reagent dispensing apparatuses and delivery methods | M. Mushtaq Ahmed | 2012-08-07 |
| 7947597 | Methods of titanium deposition | Joel Drewes, Cem Basceri | 2011-05-24 |
| 7794787 | Methods of depositing materials over substrates, and methods of forming layers over substrates | Garo Derderian, Cem Basceri | 2010-09-14 |
| 7700480 | Methods of titanium deposition | Joel Drewes, Cem Basceri | 2010-04-20 |
| 7611971 | Method of removing residual contaminants from an environment | Cem Basceri, Christopher W. Hill, Garo Derderian | 2009-11-03 |
| 7544388 | Methods of depositing materials over substrates, and methods of forming layers over substrates | Garo Derderian, Cem Basceri | 2009-06-09 |
| 7498057 | Deposition methods | Garo Derderian, Cem Basceri, Gurtej S. Sandhu, F. Daniel Gealy, Chris M. Carlson | 2009-03-03 |
| 7378354 | Atomic layer deposition methods | Garo Derderian, Cem Basceri, Gurtej S. Sandhu, F. Daniel Gealy, Chris M. Carlson | 2008-05-27 |
| 7368381 | Methods of forming materials | Garo Derderian, Cem Basceri | 2008-05-06 |
| 7368382 | Atomic layer deposition methods | Garo Derderian, Cem Basceri, Gurtej S. Sandhu, F. Daniel Gealy, Chris M. Carlson | 2008-05-06 |
| 7329615 | Atomic layer deposition method of forming an oxide comprising layer on a substrate | Garo Derderian, Shuang Meng | 2008-02-12 |
| 7303991 | Atomic layer deposition methods | Garo Derderian, Cem Basceri, Gurtej S. Sandhu, F. Daniel Gealy, Chris M. Carlson | 2007-12-04 |
| 7282239 | Systems and methods for depositing material onto microfeature workpieces in reaction chambers | Shuang Meng, Garo Derderian | 2007-10-16 |
| 7279398 | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces | Cem Basceri, Trung T. Doan, Ronald A. Weimer, Kevin L. Beaman, Lyle Breiner +3 more | 2007-10-09 |
| 7247561 | Method of removing residual contaminants from an environment | Cem Basceri, Christopher W. Hill, Garo Derderian | 2007-07-24 |
| 7119034 | Atomic layer deposition method of forming an oxide comprising layer on a substrate | Garo Derderian, Shuang Meng | 2006-10-10 |
| 7087525 | Methods of forming layers over substrates | Garo Derderian, Cem Basceri | 2006-08-08 |
| 7067438 | Atomic layer deposition method of forming an oxide comprising layer on a substrate | Garo Derderian, Shuang Meng | 2006-06-27 |
| 7056806 | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces | Cem Basceri, Trung T. Doan, Ronald A. Weimer, Kevin L. Beaman, Lyle Breiner +3 more | 2006-06-06 |
| 7048968 | Methods of depositing materials over substrates, and methods of forming layers over substrates | Garo Derderian, Cem Basceri | 2006-05-23 |
| 6896730 | Atomic layer deposition apparatus and methods | Garo Derderian, Cem Basceri, Gurtej S. Sandhu | 2005-05-24 |
| 6890596 | Deposition methods | Garo Derderian, Cem Basceri, Gurtej S. Sandhu, F. Daniel Gealy, Chris M. Carlson | 2005-05-10 |
| 6844260 | Insitu post atomic layer deposition destruction of active species | Shuang Meng, Garo Derderian | 2005-01-18 |
| 6835664 | Methods of forming trenched isolation regions | Garo Derderian, Cem Basceri | 2004-12-28 |