Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8518184 | Methods and systems for controlling temperature during microfeature workpiece processing, E.G., CVD deposition | Kevin L. Beaman, Trung T. Doan, Ronald A. Weimer, Er-Xuan Ping, David J. Kubista +2 more | 2013-08-27 |
| 8384192 | Methods for forming small-scale capacitor structures | Lingyi A. Zheng, Trung T. Doan, Er-Xuan Ping, Kevin L. Beaman, Ronald A. Weimer +2 more | 2013-02-26 |
| 7906393 | Methods for forming small-scale capacitor structures | Lingyi A. Zheng, Trung T. Doan, Er-Xuan Ping, Kevin L. Beaman, Ronald A. Weimer +2 more | 2011-03-15 |
| 7771537 | Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition | Kevin L. Beaman, Trung T. Doan, Ronald A. Weimer, Er-Xuan Ping, David J. Kubista +2 more | 2010-08-10 |
| 7647886 | Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers | David J. Kubista, Trung T. Doan, Ronald A. Weimer, Kevin L. Beaman, Er-Xuan Ping +2 more | 2010-01-19 |
| 7528430 | Electronic systems | Shenlin Chen, Trung T. Doan, Guy T. Blalock, Er-Xuan Ping | 2009-05-05 |
| 7440255 | Capacitor constructions and methods of forming | Brent A. McClure, Casey Kurth, Shenlin Chen, Debra K. Gould, Er-Xuan Ping +2 more | 2008-10-21 |
| 7422635 | Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces | Lingyi A. Zheng, Trung T. Doan, Er-Xuan Ping, Kevin L. Beaman, Ronald A. Weimer +2 more | 2008-09-09 |
| 7405438 | Capacitor constructions and semiconductor structures | Shenlin Chen, Trung T. Doan, Guy T. Blalock, Er-Xuan Ping | 2008-07-29 |
| 7344755 | Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers | Kevin L. Beaman, Ronald A. Weimer, Er-Xuan Ping, Trung T. Doan, Cem Basceri +2 more | 2008-03-18 |
| 7321148 | Capacitor constructions and rugged silicon-containing surfaces | Guy T. Blalock, Er-Xuan Ping, Shenlin Chen | 2008-01-22 |
| 7279398 | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces | Cem Basceri, Trung T. Doan, Ronald A. Weimer, Kevin L. Beaman, Lingyi A. Zheng +3 more | 2007-10-09 |
| 7268382 | DRAM cells | Shenlin Chen, Trung T. Doan, Guy T. Blalock, Er-Xuan Ping | 2007-09-11 |
| 7258892 | Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition | Kevin L. Beaman, Trung T. Doan, Ronald A. Weimer, Er-Xuan Ping, David J. Kubista +2 more | 2007-08-21 |
| 7247581 | Methods for treating pluralities of discrete semiconductor substrates | Trung T. Doan, Er-Xuan Ping, Lingyi A. Zheng | 2007-07-24 |
| 7235138 | Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces | Lingyi A. Zheng, Trung T. Doan, Er-Xuan Ping, Ronald A. Weimer, David J. Kubista +2 more | 2007-06-26 |
| 7220312 | Methods for treating semiconductor substrates | Trung T. Doan, Er-Xuan Ping, Lingyi A. Zheng | 2007-05-22 |
| 7183208 | Methods for treating pluralities of discrete semiconductor substrates | Trung T. Doan, Er-Xuan Ping, Lingyi A. Zheng | 2007-02-27 |
| 7112544 | Method of atomic layer deposition on plural semiconductor substrates simultaneously | Trung T. Doan, Er-Xuan Ping, Lingyi A. Zheng | 2006-09-26 |
| 7056806 | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces | Cem Basceri, Trung T. Doan, Ronald A. Weimer, Kevin L. Beaman, Lingyi A. Zheng +3 more | 2006-06-06 |
| 6916723 | Methods of forming rugged semiconductor-containing surfaces | Shenlin Chen, Trung T. Doan, Guy T. Blalock, Er-Xuan Ping | 2005-07-12 |
| 6887755 | Methods of forming rugged silicon-containing surfaces | Guy T. Blalock | 2005-05-03 |
| 6881636 | Methods of forming deuterated silicon nitride-containing materials | Ronald A. Weimer | 2005-04-19 |
| 6835674 | Methods for treating pluralities of discrete semiconductor substrates | Trung T. Doan, Er-Xuan Ping, Lingyi A. Zheng | 2004-12-28 |
| 6551893 | Atomic layer deposition of capacitor dielectric | Lingyi A. Zheng, Er-Xuan Ping, Trung T. Doan | 2003-04-22 |