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Method for forming a selective contact and local interconnect in situ |
Weimin Li, Gurtej S. Sandhu |
2010-12-28 |
| 7846812 |
Methods of forming trench isolation and methods of forming floating gate transistors |
— |
2010-12-07 |
| 7737047 |
Semiconductor constructions, and methods of forming dielectric materials |
— |
2010-06-15 |
| 7611971 |
Method of removing residual contaminants from an environment |
Demetrius Sarigiannis, Cem Basceri, Garo Derderian |
2009-11-03 |
| 7402533 |
Masking without photolithography during the formation of a semiconductor device |
— |
2008-07-22 |
| 7271050 |
Silicon nanocrystal capacitor and process for forming same |
— |
2007-09-18 |
| 7247561 |
Method of removing residual contaminants from an environment |
Demetrius Sarigiannis, Cem Basceri, Garo Derderian |
2007-07-24 |
| 7214979 |
Selectively deposited silicon oxide layers on a silicon substrate |
William Budge, Gurtej S. Sandhu |
2007-05-08 |
| 7192893 |
Use of linear injectors to deposit uniform selective ozone TEOS oxide film by pulsing reactants on and off |
William Budge, Gurtej S. Sandhu |
2007-03-20 |
| 7173304 |
Method of manufacturing devices comprising conductive nano-dots, and devices comprising same |
Ronald A. Weimer |
2007-02-06 |
| 7101814 |
Masking without photolithography during the formation of a semiconductor device |
— |
2006-09-05 |
| 6924969 |
Silicon nanocrystal capacitor and process for forming same |
— |
2005-08-02 |
| 6808983 |
Silicon nanocrystal capacitor and process for forming same |
— |
2004-10-26 |
| 6777351 |
Masking without photolithography during the formation of a semiconductor device |
— |
2004-08-17 |
| 6617230 |
Use of selective ozone teos oxide to create variable thickness layers and spacers |
William Budge, Gurtej S. Sandhu |
2003-09-09 |
| 6602807 |
Use of linear injectors to deposit uniform selective ozone TEOS oxide film by pulsing reactants on and off |
William Budge, Gurtej S. Sandhu |
2003-08-05 |
| 6503851 |
Use of linear injectors to deposit uniform selective ozone TEOS oxide film by pulsing reactants on and off |
William Budge, Gurtej S. Sandhu |
2003-01-07 |
| 6372643 |
Method for forming a selective contact and local interconnect in situ and semiconductor devices carrying the same |
Weimin Li, Gurtej S. Sandhu |
2002-04-16 |
| 6368986 |
Use of selective ozone TEOS oxide to create variable thickness layers and spacers |
William Budge, Gurtej S. Sandhu |
2002-04-09 |
| 6198144 |
Passivation of sidewalls of a word line stack |
Pai-Hung Pan, Martin C. Roberts, Gurtei Sandhu, Weimin Li, Vishnu K. Agarwal |
2001-03-06 |
| 5960303 |
Process of forming titanium silicide interconnects |
— |
1999-09-28 |
| 4784973 |
Semiconductor contact silicide/nitride process with control for silicide thickness |
E. Henry Stevens, Paul J. McClure |
1988-11-15 |