Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7943204 | Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation | W. Karl Olander, Jose I. Arno | 2011-05-17 |
| 7819981 | Methods for cleaning ion implanter components | Frank Dimeo, Jr., James Dietz, W. Karl Olander, Steven E. Bishop, Jeffrey W. Neuner +1 more | 2010-10-26 |
| 7057192 | Radial scan arm and collimator for serial processing of semiconductor wafers with ribbon beams | Nicholas R. White | 2006-06-06 |
| 5996528 | Method and apparatus for flowing gases into a manifold at high potential | Donald W. Berrian, John D. Pollock | 1999-12-07 |
| 5595784 | Titanium nitride and multilayers formed by chemical vapor deposition of titanium halides | John W. Vanderpot | 1997-01-21 |
| 4980562 | Method and apparatus for high efficiency scanning in an ion implanter | Donald W. Berrian, John W. Vanderpot | 1990-12-25 |
| 4922106 | Ion beam scanning method and apparatus | Donald W. Berrian, John W. Vanderpot | 1990-05-01 |