Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7566887 | Method of reducing particle contamination for ion implanters | Yongzhang Huang, Zhang Jincheng | 2009-07-28 |
| 7507977 | System and method of ion beam control in response to a beam glitch | Yongzhang Huang, John Zheng Ye, David Tao, Patrick Splinter | 2009-03-24 |