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Que Weiguo

AT Axcelis Technologies: 2 patents #105 of 300Top 35%
Overall (All Time): #2,133,241 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7566887 Method of reducing particle contamination for ion implanters Yongzhang Huang, Zhang Jincheng 2009-07-28
7507977 System and method of ion beam control in response to a beam glitch Yongzhang Huang, John Zheng Ye, David Tao, Patrick Splinter 2009-03-24