Tent-Chao D. Tao

AT Axcelis Technologies: 1 patents #165 of 300Top 60%

📍 Saugus, MA: #68 of 138 inventorsTop 50%

🗺 Massachusetts: #56,664 of 88,656 inventorsTop 65%

Overall (All Time): #3,169,516 of 4,157,543Top 80%

Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
8500382	Airflow management for particle abatement in semiconductor manufacturing equipment	James S. Castantini, Erin Madden, Donald N. Polner	2013-08-06