Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842752 | Optical heat source with restricted wavelengths for process heating | W. Davis Lee, William F. DiVergilio, Marvin Farley | 2017-12-12 |
| 7924159 | Remote wafer presence detection with passive RFID | Kan Ota, Michael Chen | 2011-04-12 |
| 7402821 | Application of digital frequency and phase synthesis for control of electrode voltage phase in a high-energy ion implantation machine, and a means for accurate calibration of electrode voltage phase | — | 2008-07-22 |
| 7321299 | Workpiece handling alignment system | Kevin Verrier, Jerry Negrotti, Donald N. Polner | 2008-01-22 |