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Home › Application of digital frequency and phase synthesis for control of electrode voltage phase in a high-energy ion implantation machine, and a means for accurate calibration of electrode voltage phase

Application of digital frequency and phase synthesis for control of electrode voltage phase in a high-energy ion implantation machine, and a means for accurate calibration of electrode voltage phase

US Patent 7402821 · Granted Jul 22, 2008

Estimated economic value: $6,083,000 ⓘ

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