DD

Donald E. DeLuca

AT Axcelis Technologies: 1 patents #165 of 300Top 60%
Overall (All Time): #3,576,669 of 4,157,543Top 90%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6207964 Continuously variable aperture for high-energy ion implanter Edward K. McIntyre, Gerald L. Dionne, Paul A. Loomis, Hans J. Rutishauser, Donald N. Polner +1 more 2001-03-27