Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9869021 | Showerhead apparatus for a linear batch chemical vapor deposition system | Piero Sferlazzo, Dennis R. Stucky, Paul Thomas Fabiano, Matthew C. Farrell, Robert P. Couilliard | 2018-01-16 |
| 9169562 | Parallel batch chemical vapor deposition system | Piero Sferlazzo | 2015-10-27 |
| 8225527 | Cooling apparatus for a web deposition system | Piero Sferlazzo, Donald N. Polner | 2012-07-24 |
| 7008879 | Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry | Chunghsin Lee, Jian Zhang, Keith D. Mullins, David A. Wassen | 2006-03-07 |
| 6827789 | Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry | Chunghsin Lee, Jian Zhang, Keith D. Mullius, David A. Wassen | 2004-12-07 |