Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827789 | Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry | Chunghsin Lee, Jian Zhang, Darren M. Simonelli, David A. Wassen | 2004-12-07 |