| 12012287 |
Tension mechanism for belt-type triboelectric separator devices |
Jose L. Rivera-Ortiz |
2024-06-18 |
| 8974731 |
Sample carrier and/or sample carrier processing apparatus |
— |
2015-03-10 |
| 8795592 |
Sample thermal cycling |
— |
2014-08-05 |
| 7952851 |
Wafer grounding method for electrostatic clamps |
Marvin R. LaFontaine, Ashwin M. Purohit, William D. Lee |
2011-05-31 |
| 7560705 |
Workpiece handling scan arm for ion implantation system |
Donovan Beckel, Robert J. Mitchell, Michel Pharand, Marvin R. LaFontaine, Ashwin M. Purohit +4 more |
2009-07-14 |
| 7100759 |
Magnetic support structure for an elevator tube of a vertical rapid thermal processing unit |
Michel Pharand, Dennis Normandin |
2006-09-05 |
| 7070661 |
Uniform gas cushion wafer support |
Richard Gueler, Michel Pharand |
2006-07-04 |
| 7026581 |
Apparatus for positioning an elevator tube |
Michel Pharand, Thomas L. Durant, Richard Gueler |
2006-04-11 |