Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9558914 | Bipolar wafer charge monitor system and ion implantation system comprising same | Marvin Farley, Takao Sakase | 2017-01-31 |
| 7560705 | Workpiece handling scan arm for ion implantation system | Ari Eiriksson, Donovan Beckel, Robert J. Mitchell, Michel Pharand, Marvin R. LaFontaine +4 more | 2009-07-14 |