Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Uniform gas cushion wafer support

Uniform gas cushion wafer support

US Patent 7070661 · Granted Jul 4, 2006

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Tension mechanism for belt-type triboelectric separator devices2024
Water cooled, air bearing based rotating anode x-ray illumination source2024
Actuator assembly including magnetic sensor system for vibrationless position fe2019
Rotary probe head2018
System and method for controlling a temperature of a reaction assembly2017
Apparatus, optical assembly, method for inspection or measurement of an object a2017
Sample carrier and/or sample carrier processing apparatus2015
Sample thermal cycling2014
Direct drive modular belt conveyor, cartridge, and quick connect-disconnect cons2013
Wafer grounding method for electrostatic clamps2011
Combination load lock for handling workpieces2010
Workpiece handling scan arm for ion implantation system2009