EH

Eric R. Harrington

AT Axcelis Technologies: 3 patents #78 of 300Top 30%
TE Tel Epion: 1 patents #37 of 54Top 70%
Overall (All Time): #1,249,166 of 4,157,543Top 35%
4
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7608843 Method and apparatus for scanning a workpiece through an ion beam Avrum Freytsis, Matthew C. Gwinn 2009-10-27
6534775 Electrostatic trap for particles entrained in an ion beam Victor M. Benveniste, Michael Graf, Robert D. Rathmell 2003-03-18
6525326 System and method for removing particles entrained in an ion beam Victor M. Benveniste, Jeffrey A. Burgess, John Zheng Ye 2003-02-25
6476399 System and method for removing contaminant particles relative to an ion beam Victor M. Benveniste, Michael Graf, Robert D. Rathmell 2002-11-05