Showing 1–8 of 8 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Victor M. Benveniste | Axcelis Technologies | 82 |
| 2 | John W. Stafford | Motorola | 30 |
| 3 | David S. Strait | Climax Portable Machine Tools | 17 |
| #4 | Gary Lee Viviani | In-Situ | 15 |
| #5 | Dirk Steinhour | — | 3 |
| #6 | Scott P. Pimley | — | 1 |
| #6 | Clifford L. Parsons | — | 1 |
| #6 | Homer W. Lindsey | — | 1 |
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