Issued Patents All Time
Showing 51–75 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664547 | Ion source providing ribbon beam with controllable density profile | — | 2003-12-16 |
| 6664548 | Ion source and coaxial inductive coupler for ion implantation system | William F. DiVergilio | 2003-12-16 |
| 6541781 | Waveguide for microwave excitation of plasma in an ion beam guide | John Zheng Ye, William F. DiVergilio | 2003-04-01 |
| 6534775 | Electrostatic trap for particles entrained in an ion beam | Eric R. Harrington, Michael Graf, Robert D. Rathmell | 2003-03-18 |
| 6525326 | System and method for removing particles entrained in an ion beam | Eric R. Harrington, Jeffrey A. Burgess, John Zheng Ye | 2003-02-25 |
| 6476399 | System and method for removing contaminant particles relative to an ion beam | Eric R. Harrington, Michael Graf, Robert D. Rathmell | 2002-11-05 |
| 6414329 | Method and system for microwave excitation of plasma in an ion beam guide | William F. DiVergilio, Frank Sinclair | 2002-07-02 |
| 6291828 | Glass-like insulator for electrically isolating electrodes from ion implanter housing | Kourosh Saadatmand, David Swenson, William F. DiVergilio, Stephen M. Quinn, Zhimin Wan | 2001-09-18 |
| 6207963 | Ion beam implantation using conical magnetic scanning | — | 2001-03-27 |
| 6135128 | Method for in-process cleaning of an ion source | Michael Graf | 2000-10-24 |
| 6065499 | Lateral stress relief mechanism for vacuum bellows | Alexander F. Pless, Gary J. Rosen, Allan D. Weed, Ernest E. Allen, Perry J. I. Justesen | 2000-05-23 |
| 5821677 | Ion source block filament with laybrinth conductive path | — | 1998-10-13 |
| 5814819 | System and method for neutralizing an ion beam using water vapor | Frank Sinclair, Jiong Chen | 1998-09-29 |
| 5814823 | System and method for setecing neutral particles in an ion bean | — | 1998-09-29 |
| 5780863 | Accelerator-decelerator electrostatic lens for variably focusing and mass resolving an ion beam in an ion implanter | Peter L. Kellerman | 1998-07-14 |
| 5736743 | Method and apparatus for ion beam formation in an ion implanter | — | 1998-04-07 |
| 5703375 | Method and apparatus for ion beam neutralization | Jiong Chen | 1997-12-30 |
| 5691537 | Method and apparatus for ion beam transport | John Chen, Thomas N. Horsky, William E. Reynolds | 1997-11-25 |
| 5661308 | Method and apparatus for ion formation in an ion implanter | Michasel Cristoforo | 1997-08-26 |
| 5554857 | Method and apparatus for ion beam formation in an ion implanter | — | 1996-09-10 |
| 5531420 | Ion beam electron neutralizer | — | 1996-07-02 |
| 5373164 | Ion beam conical scanning system | — | 1994-12-13 |
| 5218210 | Broad beam flux density control | Edward K. McIntyre, Walter Hrynyk | 1993-06-08 |
| 5198676 | Ion beam profiling method and apparatus | Peter L. Kellerman, John Schussler | 1993-03-30 |
| 5164599 | Ion beam neutralization means generating diffuse secondary emission electron shower | — | 1992-11-17 |