Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10002764 | Sputter etch material selectivity | Kevin Anglin, Tristan Y. Ma, Morgan Evans, John Hautala | 2018-06-19 |
| 8679960 | Technique for processing a substrate having a non-planar surface | George D. Papasouliotis, Vikram Singh, Helen L. Maynard, Ludovic Godet | 2014-03-25 |
| 8507372 | Method for processing a substrate having a non-planar substrate surface | George D. Papasouliotis, Vikram Singh | 2013-08-13 |
| 8202792 | Method of processing a substrate having a non-planar surface | George D. Papasouliotis, Vikram Singh | 2012-06-19 |
| 7863194 | Implantation of multiple species to address copper reliability | George D. Papasouliotis, Vikram Singh | 2011-01-04 |
| 7737013 | Implantation of multiple species to address copper reliability | George D. Papasouliotis, Vikram Singh | 2010-06-15 |