Issued Patents All Time
Showing 26–47 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530615 | Techniques for improving the performance and extending the lifetime of an ion source | Neil J. Bassom, Wilhelm P. Platow | 2016-12-27 |
| 9514912 | Control of ion angular distribution of ion beams with hidden deflection electrode | Costel Biloiu, Tyler Rockwell, Christopher Campbell, Vikram Singh, Svetlana B. Radovanov | 2016-12-06 |
| 9288889 | Apparatus and techniques for energetic neutral beam processing | Svetlana B. Radovanov, Bon-Woong Koo, Ludovic Godet | 2016-03-15 |
| 9034743 | Method for implant productivity enhancement | Bon-Woong Koo, John A. Frontiero, William T. Levay, Christopher J. Leavitt, Timothy J. Miller +3 more | 2015-05-19 |
| 8847496 | Inductively coupled plasma flood gun using an immersed low inductance RF coil and multicusp magnetic arrangement | Victor M. Benveniste, Oliver V. Naumovski | 2014-09-30 |
| 8669538 | Method of improving ion beam quality in an implant system | Bon-Woong Koo, Christopher J. Leavitt, Timothy J. Miller, Svetlana B. Radovanov | 2014-03-11 |
| 8659229 | Plasma attenuation for uniformity control | Frank Sinclair, Costel Biloiu, Ludovic Godet, Ernest E. Allen | 2014-02-25 |
| 8471476 | Inductively coupled plasma flood gun using an immersed low inductance FR coil and multicusp magnetic arrangement | Victor M. Benveniste, Oliver V. Naumovski | 2013-06-25 |
| 8461554 | Apparatus and method for charge neutralization during processing of a workpiece | Christopher J. Leavitt, Daniel Distaso, Timothy J. Miller | 2013-06-11 |
| 8366871 | Method and apparatus for cleaning and surface conditioning objects using plasma | — | 2013-02-05 |
| 8092643 | Method and apparatus for cleaning and surface conditioning objects using plasma | — | 2012-01-10 |
| 8092644 | Method and apparatus for cleaning and surface conditioning objects using plasma | — | 2012-01-10 |
| 8003956 | Method and apparatus for controlling beam current uniformity in an ion implanter | D. Jeffrey Lischer, John (Bon-Woong) Koo, Shardul S. Patel, Wilhelm P. Platow | 2011-08-23 |
| 8003959 | Ion source cleaning end point detection | Wilhelm P. Platow, Neil J. Bassom, Alexander S. Perel, Craig R. Chaney | 2011-08-23 |
| 7812321 | Techniques for providing a multimode ion source | Rajesh Dorai, Costel Biloiu, Wilhelm P. Platow | 2010-10-12 |
| 7767986 | Method and apparatus for controlling beam current uniformity in an ion implanter | Rajesh Dorai, Alexander S. Perel, Wilhelm P. Platow | 2010-08-03 |
| 7476877 | Wafer charge monitoring | Russell J. Low, George M. Gammel, Eric R. Cobb | 2009-01-13 |
| 7459704 | Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms | Joseph C. Olson, Anthony Renau, Donna L. Smatlak, Kurt Deckerlucke, Paul J. Murphy +2 more | 2008-12-02 |
| 7367344 | Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads | — | 2008-05-06 |
| 7094314 | Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads | — | 2006-08-22 |
| 7017594 | Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads | — | 2006-03-28 |
| 6703771 | Monochromatic vacuum ultraviolet light source for photolithography applications based on a high-pressure microhollow cathode discharge | Kurt F. Becker, Karl H. Schoenbach | 2004-03-09 |