Issued Patents All Time
Showing 26–50 of 69 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9236257 | Techniques to mitigate straggle damage to sensitive structures | Christopher R. Hatem, John Hautala, Ludovic Godet | 2016-01-12 |
| 9076625 | Indirectly heated cathode cartridge design | Craig R. Chaney, Leo V. Klos, Alexander S. Perel | 2015-07-07 |
| 9024282 | Techniques and apparatus for high rate hydrogen implantation and co-implantion | Svetlana B. Radovanov, Ludovic Godet, Xianfeng Lu | 2015-05-05 |
| 8937004 | Apparatus and method for controllably implanting workpieces | Ludovic Godet, Timothy J. Miller, Joseph C. Olson, Vikram Singh, James P. Buonodono +4 more | 2015-01-20 |
| 8716682 | Apparatus and method for multiple slot ion implantation | Ludovic Godet, Timothy J. Miller, Joseph C. Olson | 2014-05-06 |
| 8698107 | Technique and apparatus for monitoring ion mass, energy, and angle in processing systems | Ludovic Godet, Christopher J. Leavitt, Bon-Woong Koo | 2014-04-15 |
| 8679356 | Mask system and method of patterning magnetic media | Alexander C. Kontos, Frank Sinclair | 2014-03-25 |
| 8664098 | Plasma processing apparatus | Ludovic Godet, Timothy J. Miller, Svetlana B. Radovanov, Vikram Singh | 2014-03-04 |
| 8461030 | Apparatus and method for controllably implanting workpieces | Ludovic Godet, Timothy J. Miller, Joseph C. Olson, Vikram Singh, James P. Buonodono +4 more | 2013-06-11 |
| 8455760 | Interfacing two insulation parts in high voltage environment | Russell J. Low, Kasegn D. Tekletsadik, Piotr Lubicki, D. Jeffrey Lischer, Steve Krause +2 more | 2013-06-04 |
| 8288255 | N-type doping of zinc telluride | Xianfeng Lu, Ludovic Godet | 2012-10-16 |
| 8101510 | Plasma processing apparatus | Ludovic Godet, Timothy J. Miller, Svetlana B. Radovanov, Vikram Singh | 2012-01-24 |
| 7863520 | Interfacing two insulation parts in high voltage environment | Russell J. Low, Kasegn D. Tekletsadik, Piotr Lubicki, D. Jeffrey Lischer, Steve Krause +2 more | 2011-01-04 |
| 7820986 | Techniques for controlling a charged particle beam | Piotr Lubicki, Russell J. Low, Joseph C. Olson | 2010-10-26 |
| 7812325 | Implanting with improved uniformity and angle control on tilted wafers | James P. Buonodono, Paul J. Murphy, Joseph C. Olson | 2010-10-12 |
| RE41214 | Bi mode ion implantation with non-parallel ion beams | Joseph C. Olson | 2010-04-13 |
| 7683347 | Technique for improving ion implantation throughput and dose uniformity | Atul Gupta, Donna L. Smatlak, Joseph C. Olson | 2010-03-23 |
| 7675047 | Technique for shaping a ribbon-shaped ion beam | Svetlana B. Radovanov, Peter L. Kellerman, Victor M. Benveniste, Robert C. Lindberg, Kenneth H. Purser +2 more | 2010-03-09 |
| 7642150 | Techniques for forming shallow junctions | Edwin Arevalo, Christopher R. Hatem, Jonathan Gerald England | 2010-01-05 |
| 7579605 | Multi-purpose electrostatic lens for an ion implanter system | James S. Buff, Svetlana B. Radovanov | 2009-08-25 |
| 7547900 | Techniques for providing a ribbon-shaped gas cluster ion beam | Joseph C. Olson, Jonathan Gerald England | 2009-06-16 |
| 7459692 | Electron confinement inside magnet of ion implanter | Joseph C. Olson, Shengwu Chang, James S. Buff | 2008-12-02 |
| 7459704 | Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms | Joseph C. Olson, Donna L. Smatlak, Kurt Deckerlucke, Paul J. Murphy, Alexander S. Perel +2 more | 2008-12-02 |
| 7402816 | Electron injection in ion implanter magnets | Donna L. Smatlak, James S. Buff, Eric D. Hermanson | 2008-07-22 |
| 7402820 | Ion beam contamination determination | Russell J. Low, Joseph C. Olson, Antonella Cucchetti, Marie Welsch | 2008-07-22 |