Issued Patents All Time
Showing 51–69 of 69 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7391038 | Technique for isocentric ion beam scanning | Joseph C. Olson | 2008-06-24 |
| 7339179 | Technique for providing a segmented electrostatic lens in an ion implanter | Svetlana B. Radovanov, James S. Buff | 2008-03-04 |
| RE40009 | Methods and apparatus for adjusting beam parallelism in ion implanters | Joseph C. Olson | 2008-01-22 |
| 7276847 | Cathode assembly for indirectly heated cathode ion source | Joseph C. Olson, Leo V. Klos, Nicholas A. Venuto | 2007-10-02 |
| 7250617 | Ion beam neutral detection | Joseph C. Olson, Eric D. Hermanson, Gordon C. Angel | 2007-07-31 |
| 7170067 | Ion beam measurement apparatus and method | Eric D. Hermanson, Joseph C. Olson, Gordon C. Angel | 2007-01-30 |
| 7166854 | Uniformity control multiple tilt axes, rotating wafer and variable scan velocity | Joseph C. Olson, Donna L. Smatlak, Jun Lu | 2007-01-23 |
| 7161161 | Uniformity control using multiple fixed wafer orientations and variable scan velocity | Joseph C. Olson, Donna L. Smatlak, Jun Lu | 2007-01-09 |
| 6828204 | Method and system for compensating for anneal non-uniformities | — | 2004-12-07 |
| 6791097 | Adjustable conductance limiting aperture for ion implanters | Jay T. Scheuer, Eric D. Hermanson | 2004-09-14 |
| 6777686 | Control system for indirectly heated cathode ion source | Joseph C. Olson, Daniel Distaso | 2004-08-17 |
| 6635880 | High transmission, low energy beamline architecture for ion implanter | — | 2003-10-21 |
| 6573518 | Bi mode ion implantation with non-parallel ion beams | Joseph C. Olson | 2003-06-03 |
| 6437350 | Methods and apparatus for adjusting beam parallelism in ion implanters | Joseph C. Olson | 2002-08-20 |
| 6403972 | Methods and apparatus for alignment of ion beam systems using beam current sensors | Antonella Cucchetti, Leo V. Klos, Joseph C. Olson, Raymond L. Pelletier, Keith Pierce +1 more | 2002-06-11 |
| 6313475 | Acceleration and analysis architecture for ion implanter | Charles M. McKenna | 2001-11-06 |
| 6130436 | Acceleration and analysis architecture for ion implanter | Charles M. McKenna | 2000-10-10 |
| 5350926 | Compact high current broad beam ion implanter | Nicholas R. White, Manny Sieradzki | 1994-09-27 |
| 4825087 | System and methods for wafer charge reduction for ion implantation | Stephen Moffatt, Frederick Plumb | 1989-04-25 |