Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7339179 | Technique for providing a segmented electrostatic lens in an ion implanter | Anthony Renau, James S. Buff | 2008-03-04 |
| 7309997 | Monitor system and method for semiconductor processes | Edward D. MacIntosh, Gary Ayers, Philip D. Corey | 2007-12-18 |
| 7279687 | Technique for implementing a variable aperture lens in an ion implanter | Gordon C. Angel, Edward D. MacIntosh | 2007-10-09 |
| 6998625 | Ion implanter having two-stage deceleration beamline | Charles M. McKenna, Nicholas R. White, Douglas Brown, Edward W. Bell | 2006-02-14 |