Issued Patents All Time
Showing 26–50 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9297063 | Plasma potential modulated ion implantation system | Victor M. Benveniste, Bon-Woong Koo, Richard M. White, Kevin M. Daniels | 2016-03-29 |
| 9288889 | Apparatus and techniques for energetic neutral beam processing | Bon-Woong Koo, Peter F. Kurunczi, Ludovic Godet | 2016-03-15 |
| 9230773 | Ion beam uniformity control | Alexandre Likhanskii, Bon-Woong Koo | 2016-01-05 |
| 9232628 | Method and system for plasma-assisted ion beam processing | Ludovic Godet, Bon-Woong Koo | 2016-01-05 |
| 9093372 | Technique for processing a substrate | Bon-Woong Koo, Richard M. White, Kevin M. Daniels, Eric R. Cobb, David W. Pitman | 2015-07-28 |
| 9064795 | Technique for processing a substrate | Bon-Woong Koo, Richard M. White, Kevin M. Daniels, Eric R. Cobb, David W. Pitman | 2015-06-23 |
| 9024282 | Techniques and apparatus for high rate hydrogen implantation and co-implantion | Ludovic Godet, Anthony Renau, Xianfeng Lu | 2015-05-05 |
| 9024273 | Method to generate molecular ions from ions with a smaller atomic mass | Ludovic Godet, Christopher R. Hatem | 2015-05-05 |
| 8907300 | System and method for plasma control using boundary electrode | Ludovic Godet, Tyler Rockwell, Chris Campbell | 2014-12-09 |
| 8877654 | Pulsed plasma to affect conformal processing | Helen L. Maynard, Vikram Singh, Harold Persing | 2014-11-04 |
| 8742373 | Method of ionization | Ludovic Godet, Christopher R. Hatem | 2014-06-03 |
| 8669538 | Method of improving ion beam quality in an implant system | Bon-Woong Koo, Christopher J. Leavitt, Peter F. Kurunczi, Timothy J. Miller | 2014-03-11 |
| 8664098 | Plasma processing apparatus | Ludovic Godet, Timothy J. Miller, Anthony Renau, Vikram Singh | 2014-03-04 |
| 8604443 | System and method for manipulating an ion beam | Frank Sinclair, Victor M. Benveniste, James S. Buff | 2013-12-10 |
| 8519353 | Method and apparatus for controlling an asymmetric electrostatic lens about a central ray trajectory of an ion beam | Peter L. Kellerman, Frank Sinclair, Robert C. Lindberg | 2013-08-27 |
| 8481960 | Deceleration lens | Jason M. Schaller, Richard M. White, Kevin Verrier, James W. Blanchette, Bon-Woong Koo +2 more | 2013-07-09 |
| 8466431 | Techniques for improving extracted ion beam quality using high-transparency electrodes | James S. Buff, Bon-Woong Koo, Wilhelm P. Platow, Frank Sinclair, D. Jeffrey Lischer +7 more | 2013-06-18 |
| 8357912 | Techniques for providing a multimode ion source | Bon-Woong Koo, Frank Sinclair, Victor M. Benveniste | 2013-01-22 |
| 8309935 | End terminations for electrodes used in ion implantation systems | Frank Sinclair, Kenneth H. Purser | 2012-11-13 |
| 8101510 | Plasma processing apparatus | Ludovic Godet, Timothy J. Miller, Anthony Renau, Vikram Singh | 2012-01-24 |
| 7888653 | Techniques for independently controlling deflection, deceleration and focus of an ion beam | Peter L. Kellerman, Frank Sinclair, Victor M. Benveniste | 2011-02-15 |
| 7767977 | Ion source | Ludovic Godet, Timothy J. Miller | 2010-08-03 |
| 7700925 | Techniques for providing a multimode ion source | Bon-Woong Koo, Frank Sinclair, Victor M. Benveniste | 2010-04-20 |
| 7675047 | Technique for shaping a ribbon-shaped ion beam | Peter L. Kellerman, Victor M. Benveniste, Robert C. Lindberg, Kenneth H. Purser, Tyler Rockwell +2 more | 2010-03-09 |
| 7579605 | Multi-purpose electrostatic lens for an ion implanter system | Anthony Renau, James S. Buff | 2009-08-25 |