Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11473978 | Enhanced substrate temperature measurement apparatus, system and method | Dawei Sun, D. Jeffrey Lischer, Qin Chen, Dale K. Stone, Lyudmila Stone +2 more | 2022-10-18 | $26,737,000 |
| 11069554 | Carbon nanotube electrostatic chuck | Dawei Sun, Steven M. Anella, Qin Chen, Julian G. Blake, David J. Chipman | 2021-07-20 | $88,311,000 |