Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473978 | Enhanced substrate temperature measurement apparatus, system and method | Dawei Sun, D. Jeffrey Lischer, Qin Chen, Dale K. Stone, Lyudmila Stone +2 more | 2022-10-18 |
| 11069554 | Carbon nanotube electrostatic chuck | Dawei Sun, Steven M. Anella, Qin Chen, Julian G. Blake, David J. Chipman | 2021-07-20 |