Issued Patents All Time
Showing 51–58 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5760405 | Plasma chamber for controlling ion dosage in ion implantation | Michael King, Peter Rose | 1998-06-02 |
| 5670217 | Method for capturing and removing contaminant particles from an interior region of an ion implanter | Robert Becker, David J. Chipman, Mary Jones, Lyudmila Menn, Frank Sinclair +1 more | 1997-09-23 |
| 5656092 | Apparatus for capturing and removing contaminant particles from an interior region of an ion implanter | Robert Becker, David J. Chipman, Mary Jones, Lyudmila Menn, Frank Sinclair +1 more | 1997-08-12 |
| 5633506 | Method and apparatus for in situ removal of contaminants from ion beam neutralization and implantation apparatuses | — | 1997-05-27 |
| 5554854 | In situ removal of contaminants from the interior surfaces of an ion beam implanter | — | 1996-09-10 |
| 5444597 | Wafer release method and apparatus | Weilin Tu | 1995-08-22 |
| 5436790 | Wafer sensing and clamping monitor | Weilin Tu, Dale K. Stone, Scott C. Holden | 1995-07-25 |
| 5019233 | Sputtering system | Richard S. Muka, Peter R. Younger | 1991-05-28 |