Issued Patents All Time
Showing 26–50 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8592786 | Platen clamping surface monitoring | David E. Suuronen, Kurt Decker-Lucke, James C. Carroll, Klaus Petry | 2013-11-26 |
| 8531814 | Removal of charge between a substrate and an electrostatic clamp | Dale K. Stone, Lyudmila Stone, Klaus Petry, David E. Suuronen | 2013-09-10 |
| 8487280 | Modulating implantation for improved workpiece splitting | Gary E. Dickerson | 2013-07-16 |
| 8466039 | Pressurized treatment of substrates to enhance cleaving process | Deepak A. Ramappa | 2013-06-18 |
| 8461552 | Active particle trapping for process control | Peter Nunan, Gregory Redinbo, Paul S. Buccos | 2013-06-11 |
| 8329260 | Cooled cleaving implant | Paul J. Murphy | 2012-12-11 |
| 8319196 | Technique for low-temperature ion implantation | Jonathan Gerald England, Steven R. Walther, Richard S. Muka, Paul J. Murphy, Reuel B. Liebert | 2012-11-27 |
| 8153466 | Mask applied to a workpiece | Russell J. Low, Frank Sinclair | 2012-04-10 |
| 8148237 | Pressurized treatment of substrates to enhance cleaving process | Deepak A. Ramappa | 2012-04-03 |
| 8064071 | Floating sheet measurement apparatus and method | Christopher A. Rowland, Peter L. Kellerman, Frank Sinclair, Nicholas P. T. Bateman | 2011-11-22 |
| 7993698 | Techniques for temperature controlled ion implantation | Jonathan Gerald England, Scott C. Holden, Steven R. Walther, Reuel B. Liebert, Richard S. Muka +4 more | 2011-08-09 |
| 7935942 | Technique for low-temperature ion implantation | Jonathan Gerald England, Steven R. Walther, Richard S. Muka, Paul J. Murphy, Reuel B. Liebert | 2011-05-03 |
| 7816239 | Technique for manufacturing a solar cell | Kevin M. Daniels | 2010-10-19 |
| 7715170 | Electrostatic chuck with separated electrodes | Dale K. Stone, Lyudmila Stone, David E. Suuronen | 2010-05-11 |
| 7067829 | Power sag detection and control in ion implanting system | Steven Richards, Steven R. Campbell | 2006-06-27 |
| 6998353 | Active wafer cooling during damage engineering implant to enhance buried oxide formation in SIMOX wafers | Yuri Erokhin | 2006-02-14 |
| 6794662 | Thermosetting resin wafer-holding pin | William Leavitt, Steven Richards | 2004-09-21 |
| 6774376 | Wafer holding pin | Bernhard F. Cordts, III | 2004-08-10 |
| 6433342 | Coated wafer holding pin | Bernhard F. Cordts, III | 2002-08-13 |
| 6025602 | Ion implantation system for implanting workpieces | Peter Rose, Adam Brailove, Zhongmin Yang, Richard F. McRay, Barbara J. Hughey | 2000-02-15 |
| 5895923 | Ion beam shield for implantation systems | — | 1999-04-20 |
| 5828070 | System and method for cooling workpieces processed by an ion implantation system | Adam Brailove, Peter Rose, Zhongmin Yang, Kenneth H. Purser | 1998-10-27 |
| 5825038 | Large area uniform ion beam formation | Kenneth H. Purser, Adam Brailove, Peter Rose, Barbara J. Hughey | 1998-10-20 |
| 5811823 | Control mechanisms for dosimetry control in ion implantation systems | Piero Sferlazzo, Peter Rose, Adam Brailove | 1998-09-22 |
| 5793050 | Ion implantation system for implanting workpieces | Peter Rose, Adam Brailove, Zhongmin Yang, Richard F. McRay, Barbara J. Hughey | 1998-08-11 |