Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7459703 | Ion implant beam angle integrity monitoring and adjusting | Ukyo Jeong, Sandeep Mehta | 2008-12-02 |
| 7396746 | Methods for stable and repeatable ion implantation | Ziwei Fang, Justin Tocco, Carleton F. Ellis, III | 2008-07-08 |
| 7378335 | Plasma implantation of deuterium for passivation of semiconductor-device interfaces | Ukyo Jeong, Sandeep Mehta, Naushad K. Variam | 2008-05-27 |
| 7342240 | Ion beam current monitoring | Morgan Evans | 2008-03-11 |
| 7326937 | Plasma ion implantation systems and methods using solid source of dopant material | Sandeep Mehta, Naushad K. Variam | 2008-02-05 |
| RE40008 | Method and apparatus for controlling ion implantation during vacuum fluctuation | — | 2008-01-22 |
| 7132672 | Faraday dose and uniformity monitor for plasma based ion implantation | Rajesh Dorai, Harold Persing, Jay T. Scheuer, Bon-Woong Koo, Bjorn O. Pedersen +2 more | 2006-11-07 |
| 6716727 | Methods and apparatus for plasma doping and ion implantation in an integrated processing system | — | 2004-04-06 |
| 6686598 | Wafer clamping apparatus and method | — | 2004-02-03 |
| 6521895 | Wide dynamic range ion beam scanners | Nicholas R. White | 2003-02-18 |
| 6323497 | Method and apparatus for controlling ion implantation during vacuum fluctuation | — | 2001-11-27 |
| 5198677 | Production of N.sup.+ ions from a multicusp ion beam apparatus | Ka-Ngo Leung, Wulf B. Kunkel | 1993-03-30 |