Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7205231 | Method for in-situ uniformity optimization in a rapid thermal processing system | Peter A. Frisella, James Willis | 2007-04-17 |
| 6855916 | Wafer temperature trajectory control method for high temperature ramp rate applications using dynamic predictive thermal modeling | Brian Matthews, James Willis | 2005-02-15 |
| 5959305 | Method and apparatus for monitoring charge neutralization operation | Michael E. Mack, Michel Pharand, David J. Fish | 1999-09-28 |