PF

Peter A. Frisella

AT Axcelis Technologies: 1 patents #165 of 300Top 60%
Overall (All Time): #3,383,306 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7205231 Method for in-situ uniformity optimization in a rapid thermal processing system Paul Lustiber, James Willis 2007-04-17