JW

James Willis

AT Axcelis Technologies: 2 patents #105 of 300Top 35%
Overall (All Time): #1,586,926 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7205231 Method for in-situ uniformity optimization in a rapid thermal processing system Peter A. Frisella, Paul Lustiber 2007-04-17
6855916 Wafer temperature trajectory control method for high temperature ramp rate applications using dynamic predictive thermal modeling Brian Matthews, Paul Lustiber 2005-02-15
5870841 Vehicle license plate holder William M. Brody, II 1999-02-16