Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7205247 | Atomic layer deposition of hafnium-based high-k dielectric | Sang In Lee, Jon S. Owyang, Yoshihide Senzaki, Karem Kapkin | 2007-04-17 |
| 5106786 | Thin coatings for use in semiconductor integrated circuits and processes as antireflection coatings consisting of tungsten silicide | Michael Brady | 1992-04-21 |
| 5066615 | Photolithographic processes using thin coatings of refractory metal silicon nitrides as antireflection layers | Michael Brady, John K. Dorey, II | 1991-11-19 |