Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7205247 | Atomic layer deposition of hafnium-based high-k dielectric | Sang In Lee, Jon S. Owyang, Yoshihide Senzaki, Aubrey L. Helms, Jr. | 2007-04-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7205247 | Atomic layer deposition of hafnium-based high-k dielectric | Sang In Lee, Jon S. Owyang, Yoshihide Senzaki, Aubrey L. Helms, Jr. | 2007-04-17 |