CH

Christopher W. Hodgdon

AT Axcelis Technologies: 1 patents #165 of 300Top 60%
Overall (All Time): #3,325,162 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7531819 Fluorine based cleaning of an ion source William F. DiVergilio, Daniel R. Tieger, William P. Reynolds, Sean Joyce 2009-05-12