Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Heated electrostatic chuck including mechanical clamp capability at high temperature

Heated electrostatic chuck including mechanical clamp capability at high temperature

US Patent 8941968 · Granted Jan 27, 2015

Estimated economic value: $2,568,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Doped or alloyed materials and hot isostatic pressing method of making same2025
Drift tube, apparatus and ion implanter having variable focus electrode in linea2023
Doped materials/alloys and hot isostatic pressing method of making same2023
RF quadrupole particle accelerator2023
In-situ plasma cleaning of process chamber components2022
Electrically-processed laser and scintillator materials2022
System, apparatus and method for variable length electrode in linear accelerator2021
In-situ plasma cleaning of process chamber components2021
Electrically-processed laser and scintillator materials2021
Passively cavity-dumped laser apparatus, system and methods2020
Optical furnace2020
In-situ plasma cleaning of process chamber components2019