Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Variable frequency electrostatic clamping

Variable frequency electrostatic clamping

US Patent 8228658 · Granted Jul 24, 2012

Estimated economic value: $315,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vapor compression refrigeration chuck for ion implanters2017
Multi-resistivity Johnsen-Rahbek electrostatic clamp2016
Matched coefficient of thermal expansion for an electrostatic chuck2015
Gas bearing electrostatic chuck2015
Heated electrostatic chuck including mechanical clamp capability at high tempera2015
Electrostatic chuck ground punch2014
Heated annulus chuck2014
Annulus clamping and backside gas cooled electrostatic chuck2013
De-clamping wafers from an electrostatic chuck2012
Non-condensing thermos chuck2012
Electrostatic chuck with compliant coat2011
Wafer grounding method for electrostatic clamps2011