Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Cryogenically cooled rotatable electrostatic chuck

Cryogenically cooled rotatable electrostatic chuck

US Patent 11149345 · Granted Oct 19, 2021

Estimated economic value: $109,516,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Migrating resources between networks2025
Systems and methods for optimizing full horizontal scanned beam distance2025
Ion source having different modes of operation2024
Hybrid ion source for aluminum ion generation using a target holder and a solid 2024
Hybrid ion source for aluminum ion generation using organoaluminium compounds an2024
Spinning disk with electrostatic clamped platens for ion implantation2024
System and method for controlling electrostatic clamping of multiple platens on 2023
Rotary union with mechanical seal assembly2022
Cryogenic heat transfer system2021
High throughput serial wafer handling end station2020
Cryogenic ferrofluid sealed rotary union2020
Wafer processing systems including multi-position batch load lock apparatus with2020