Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System and method for controlling electrostatic clamping of multiple platens on a spinning disk

System and method for controlling electrostatic clamping of multiple platens on a spinning disk

US Patent 11670532 · Granted Jun 6, 2023

Estimated economic value: $40,761,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Spinning disk with electrostatic clamped platens for ion implantation2024
Rotary union with mechanical seal assembly2022
Cryogenically cooled rotatable electrostatic chuck2021
Cryogenic heat transfer system2021
Conductive beam optic containing internal heating element2020
High throughput serial wafer handling end station2020
System and method for minimizing backside workpiece damage2020
Wafer processing systems including multi-position batch load lock apparatus with2020
Automatic viewport releveling2019
Selectively caching sequential data items2019
Wafer processing systems including multi-position batch load lock apparatus with2019
System and method for analyzing voltage breakdown in electrostatic chucks2016