Issued Patents All Time
Showing 26–50 of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9696097 | Multi-substrate thermal management apparatus | Kallol Bera, Kim Vellore, Andrew J. Constant, Jacob Newman, Jeffrey Blahnik +3 more | 2017-07-04 |
| 9694989 | Workpiece handling system and methods of workpiece handling | Jason M. Schaller, Robert Brent Vopat, Charles T. Carlson, Malcolm N. Daniel, JR., Aaron P. Webb | 2017-07-04 |
| 9669552 | System and method for quick-swap of multiple substrates | Robert Brent Vopat, Jason M. Schaller | 2017-06-06 |
| 9659677 | Shielding device for substrate edge protection and method of using same | Aaron P. Webb, Charles T. Carlson, Timothy J. Miller, James D. Strassner | 2017-05-23 |
| 9570309 | Mask alignment system for semiconductor processing | Aaron P. Webb, Charles T. Carlson, Christopher N. Grant | 2017-02-14 |
| 9484183 | Linkage conduit for vacuum chamber applications | Eric D. Hermanson, Robert J. Mitchell, Steven M. Anella, Jeffrey Blahnik, Michael Paul Rohrer +1 more | 2016-11-01 |
| 9437392 | High-throughput ion implanter | Charles T. Carlson, Joseph C. Olson, James P. Buonodono, Paul Sullivan | 2016-09-06 |
| 9415508 | Multi-link substrate scanning device | Robert J. Mitchell | 2016-08-16 |
| 9378994 | Multi-position batch load lock apparatus and systems and methods including same | Joseph Yudovsky, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2016-06-28 |
| 9287148 | Dynamic heating method and system for wafer processing | Morgan Evans, Kevin Anglin, D. Jeffrey Lischer, Jason M. Schaller, Robert Brent Vopat | 2016-03-15 |
| 9281222 | Wafer handling systems and methods | Malcolm N. Daniel, JR., Robert Brent Vopat, Jason M. Schaller, Jacob Newman, Dinesh Kanawade +4 more | 2016-03-08 |
| 9240338 | Workpiece alignment device | Malcolm N. Daniel, JR., Charles T. Carlson | 2016-01-19 |
| 9145271 | Optimization of conveyor belts used for workpiece processing | Robert Brent Vopat, Malcolm N. Daniel, JR., Luke Bonecutter, Jason M. Schaller, Charles T. Carlson | 2015-09-29 |
| 9082799 | System and method for 2D workpiece alignment | Charles T. Carlson, Scott Alan Smith, Michael Beck, Aaron P. Webb, James D. Strassner +2 more | 2015-07-14 |
| 9016998 | High throughput, low volume clamshell load lock | Jeffrey Blahnik, Robert Brent Vopat | 2015-04-28 |
| 9000446 | Techniques for processing a substrate | Benjamin B. Riordon, Kevin M. Daniels, Steven M. Anella | 2015-04-07 |
| 8921149 | Aligning successive implants with a soft mask | Nicholas P. T. Bateman | 2014-12-30 |
| 8911193 | Substrate processing sequence in a cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, Robert B. Lowrance, Eric A. Englhardt +6 more | 2014-12-16 |
| 8912082 | Implant alignment through a mask | Nicholas P. T. Bateman, Paul Sullivan, John W. Graff | 2014-12-16 |
| 8814239 | Techniques for handling media arrays | Paul Forderhase, Julian G. Blake | 2014-08-26 |
| 8813338 | Workpiece alignment device | Malcolm N. Daniel, JR., Charles T. Carlson | 2014-08-26 |
| 8698104 | System and method for handling multiple workpieces for matrix configuration processing | Jaime A. Carrera, Robert Brent Vopat, Aaron P. Webb, Charles T. Carlson | 2014-04-15 |
| 8685846 | Technique for processing a substrate | Russell J. Low, Nicholas P. T. Bateman, Atul Gupta | 2014-04-01 |
| 8598547 | Handling beam glitches during ion implantation of workpieces | Russell J. Low, Atul Gupta | 2013-12-03 |
| 8550031 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2013-10-08 |