Issued Patents All Time
Showing 51–74 of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8497486 | Ion source having a shutter assembly | Jeffrey Blahnik | 2013-07-30 |
| 8455847 | Mask health monitor using a faraday probe | Benjamin B. Riordon, Nicholas P. T. Bateman, Russell J. Low | 2013-06-04 |
| 8330128 | Implant mask with moveable hinged mask segments | Robert Brent Vopat, Charles T. Carlson | 2012-12-11 |
| 8215262 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-07-10 |
| 8202789 | Implanting a solar cell substrate using a mask | Steven M. Anella | 2012-06-19 |
| 8181596 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-05-22 |
| 8164068 | Mask health monitor using a faraday probe | Benjamin B. Riordon, Nicholas P. T. Bateman, Russell J. Low | 2012-04-24 |
| 8146530 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-04-03 |
| 8101927 | Masking apparatus for an ion implanter | Charles T. Carlson | 2012-01-24 |
| 8084293 | Continuously optimized solar cell metallization design through feed-forward process | Benjamin B. Riordon, Russell J. Low, Atul Gupta | 2011-12-27 |
| 8066466 | Substrate processing sequence in a Cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, Robert B. Lowrance, Eric A. Englhardt +6 more | 2011-11-29 |
| 7925377 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2011-04-12 |
| 7819079 | Cartesian cluster tool configuration for lithography type processes | Eric A. Englhardt, Michael R. Rice, Jeffrey C. Hudgens, Steve Hongkham, Jay D. Pinson, II +3 more | 2010-10-26 |
| 7798764 | Substrate processing sequence in a cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, Robert B. Lowrance, Eric A. Englhardt +6 more | 2010-09-21 |
| 7794195 | Datum plate for use in installations of substrate handling systems | — | 2010-09-14 |
| 7743728 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2010-06-29 |
| 7694647 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2010-04-13 |
| 7651306 | Cartesian robot cluster tool architecture | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, Robert B. Lowrance, Eric A. Englhardt +6 more | 2010-01-26 |
| 7467919 | Automatic door opener | — | 2008-12-23 |
| 7374393 | Method of retaining a substrate during a substrate transferring process | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, Robert B. Lowrance, Eric A. Englhardt +6 more | 2008-05-20 |
| 7374391 | Substrate gripper for a substrate handling robot | Michael R. Rice, Jeffrey C. Hudgens, Charles T. Carlson, Robert B. Lowrance, Eric A. Englhardt +6 more | 2008-05-20 |
| 7360981 | Datum plate for use in installations of substrate handling systems | — | 2008-04-22 |
| 7357842 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2008-04-15 |
| 7147424 | Automatic door opener | — | 2006-12-12 |