Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Multi-wafer volume single transfer chamber facet

Multi-wafer volume single transfer chamber facet

US Patent 11817332 · Granted Nov 14, 2023

Estimated economic value: $33,075,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Instrument for medical diagnosis2025
Workpiece handling architecture for high workpiece throughput2025
Workpiece handling architecture for high workpiece throughput2025
Systems and methods for integrating load locks into a factory interface footprin2024
Systems and methods for integrating load locks into a factory interface footprin2024
Systems and methods for integrating load locks into a factory interface footprin2024
Factory interface robots usable with integrated load locks2024
Factory interface robots usable with integrated load locks2024
Factory interface robots usable with integrated load locks2024
Spinning disk with electrostatic clamped platens for ion implantation2024
Processing system having a front opening unified pod (FOUP) load lock2024
Transport system2024