Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Batch LED heating and cooling chamber or loadlock

Batch LED heating and cooling chamber or loadlock

US Patent 10283379 · Granted May 7, 2019

Estimated economic value: $13,988,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of assembling drift tube assemblies in ion implantors2025
Volume filling cassette for load lock2025
Radio frequency power return path2025
Workpiece handling architecture for high workpiece throughput2025
Workpiece handling architecture for high workpiece throughput2025
Workpiece handling architecture for high workpiece throughput2025
Workpiece handling architecture for high workpiece throughput2025
Linear accelerator assembly including flexible high-voltage connection2025
Linear accelerator assembly including flexible high-voltage connection2025
Processing chamber with annealing mini-environment2025
Processing chamber with annealing mini-environment2025
Actively clamped carrier assembly for processing tools2025