Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10699930 | Buffer chamber wafer heating mechanism and supporting robots | William T. Weaver, Jason M. Schaller, Robert Brent Vopat, Benjamin B. Riordon, Paul E. Pergande | 2020-06-30 |
| 10453726 | Electronic device manufacturing load port apparatus, systems, and methods | Paul B. Reuter, Luke Bonecutter, Douglas B. Baumgarten | 2019-10-22 |
| 10283379 | Batch LED heating and cooling chamber or loadlock | Jason M. Schaller, Robert Brent Vopat, Paul E. Pergande, Benjamin B. Riordon, William T. Weaver | 2019-05-07 |
| 10262884 | Systems, apparatus, and methods for an improved load port | Luke Bonecutter, Paul B. Reuter | 2019-04-16 |
| 10103046 | Buffer chamber wafer heating mechanism and supporting robot | William T. Weaver, Jason M. Schaller, Robert Brent Vopat, Benjamin B. Riordon, Paul E. Pergande | 2018-10-16 |
| 9899242 | Device and method for substrate heating during transport | Jason M. Schaller, Morgan Evans, Ala Moradian, Robert Brent Vopat, William T. Weaver | 2018-02-20 |
| 9728430 | Electrostatic chuck with LED heating | Jason M. Schaller, William T. Weaver, Morgan Evans, Robert Brent Vopat, Paul E. Pergande +2 more | 2017-08-08 |